Browsing by Author "Willson, Grant"
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Publication Directed self-assembly of silicon-containing block copolymers for 20nm lithography
Publication Directed self-assembly of silicon-containing block copolymers with a hybrid chemo-/grapho-epitaxial flow
Publication Evolution of roughness during the pattern transfer of high-chi, 10 nm half-pitch, silicon-containing block copolymer structures
Publication Fluorinated polymethacrylates as highly sensitive non-chemically amplified e-beam resists
Proceedings paper2009, Advances in Resist Materials and Processing Technology XXVI, 22/02/2009, p.72733GPublication High chi block copolymers: a progress report
Publication Optimizing surface treatments for the directed self-assembly of silicon-containing block copolymers