Browsing by Author "Winkelmeier, Stephanie"
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Publication Line edge roughness: characterization, modeling and impact on device behavior
Proceedings paper2002, IEDM Technical Digest, 9/12/2002, p.307-310Publication Metrology method for the correlation of line edge roughness for different resists before and after etch
Oral presentation2000, MNE; 18-21 September 2000; Jena, Germany.Publication Metrology method for the correlation of line edge roughness for different resists before and after etch
Journal article2001, Microelectronic Engineering, (57-58) 1_4, p.665-672