Browsing by Author "Woltgens, Pieter"
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Publication Advanced EUV patterning of 2D TMDs for CMOS integration
Publication Logic via printability enhancement using restricted via placement and exhaustive SRAF placement on a staggered grid
Proceedings paper2022-05-26, Conference on Optical and EUV Nanolithography XXXV Part of SPIE Advanced Conference, APR 24-MAY 27, 2022, p.120510IPublication Stitching enablement for anamorphic imaging: a ~1μm exclusion band and its implications
Proceedings paper2020, Extreme Ultraviolet Lithography 2020, 21/09/2020, p.1151713