Browsing by Author "Woo, Jeong-Jun"
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Publication Highly-conformal plasma-enhanced atomic-layer deposition silicon dioxide liner for high aspect-ratio through-silicon via 3D interconnections
Proceedings paper2012, 4th Electronics System Integration Technologies Conference - ESTC, 17/10/2012Publication Relationships between deposition parameters, step coverage, throughput, and electrical properties of PEALD SiO2 insulation liners for HVM TSV application