Browsing by Author "Wu, Y."
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Publication A theoretical and experimental study of damage-free BEOL cleaning with megasonic agitation
Publication Bifacial Four-Terminal Perovskite/Silicon Tandem Solar Cells and Modules
Publication Single wafer cleaning and drying: particle removal via a non-contact, non-damaging megasonic clean followed by a high performance "Rotagoni" dry
Proceedings paper2000, Proceedings of the 9th International Symposium on Semiconductor Manufacturing - ISSM, 26/09/2000, p.157-160Publication Sub 100nm particle removal with deionized water and a megasonic frequency of 835kHz
Proceedings paper2002, Cleaning Technology in Semiconductor Device Manufacturing VII, 4/09/2001, p.145-146Publication Sub 100nm particle removal with deionized water and a megasonic frequency of ~835kHz
Meeting abstract2001, 200th International Meeting Electrochemical Society: 7th International Symposium on Cleaning Technology in Semiconductor Device, 2/09/2001