imec Institutional Repository Browsing {{ collection }} by Author "Wu, Z."

Publication

Exploring W-Cu hybrid dual damascene metallization for future nodes

Lei, W.

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Pethe, S.

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Hwang, S.

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Chen, F.

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Wu, Z.

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Machillot, J.

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Cockburn, A.

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Jansen, A.

Proceedings paper

2021, IEEE International Interconnect Technology Conference (IITC), JUL 06-09, 2021

Publication

Novel low thermal budget gate stack solutions for BTI reliability in future Logic Device technologies

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Proceedings paper

2021, International Conference on IC Design and Technology (ICICDT), SEP 15-17, 2021

Publication

Sequential 3D: Key integration challenges and opportunities for advanced semiconductor scaling

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Wu, Z.

Proceedings paper

2018, International Conference on IC Design and Technology - ICICDT, 4/06/2018, p.145-148

Browsing by Author "Wu, Z."