Browsing by Author "Xu, Jeff"
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication CVD based selective Co deposition on Cu and W for via pre-fill
Meeting abstract2016, 25th Materials for Advanced Metalization Conference - MAM, 21/03/2016, p.PMT-12Publication PPAC scaling enablement for 5nm Mobile SoC technology