Browsing by Author "Xu, XiuMei"

300 mm wafer development for pattern collapse evaluations

300 mm wafer-level, ultra-dense arrays of Au-capped nanopillars with sub-10 nm gaps as reliable SERS substrates

An ATR-FTIR based method for dynamic analysis of wetting transitions on superhydrophobic nanostructured surfaces

Capturing wetting states in nanopatterned silicon

Capturing wetting states in nanopatterned silicon

Capturing wetting states in nanopatterned silicon

Capturing wetting states in nanopatterned silicon

Challenges in wet processing of high aspect ratio nanostructures

Challenges in wet processing of high aspect ratio nanostructures

Characterization of superhydrophobic breakdown on nanostructured silicon surfaces

Cleaning the high aspect ratio STI structures for advanced logic devices by implementation of a surface modification drying technique

Deep Learning-Based High Throughput Inspection in 3D Nanofabrication and Defect Reversal in Nanopillar Arrays: Implications for Next Generation Transistors

Dry removal of a surface functionalization chemistry used for pattern collapse prevention

Dynamics of superhydrophobic breakdown explored with in-situ ATR-FTIR

Dynamics of the drying defects left by residual ultra-pure water droplets on silicon substrate

Dynamics of thin precursor film in wetting of nanopatterned surfaces

Effects of interfacial strength and dimension of structures on physical cleaning window

Elastocapillary selfassembly of silicon nanopillars

Enhancement of acoustic heating during nucleation of acoustic cavitation inside an ultrasonic reactor cavity

Exploring wetting dynamics on superhydrophobic nanopatterned surfaces using ATR-FTIR