Browsing by Author "Xue, Panpan"
Now showing 1 - 2 of 2
- Results per page
- Sort Options
Publication The effects of VUV radiation on low-k organosilicate glass (SiCOH) as measured with electron-spin resonance
Meeting abstract2015, AVS 62nd International Symposium and Exhibition, 18/10/2015, p.177Publication Vacuum-ultraviolet-radiation damage of low-k dielectrics