Browsing by Author "Yamada, N."
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication Integration of PVD ruthenium as a pMOS metal gate in scaled planar devices: workfunction and electrical performance on HfO2
Proceedings paper2005, 4th International Conference on Semiconductor Technology - ISTC, 14/03/2005, p.62-71Publication Introducing novel metal gate materials for decananometer CMOS in the agile fab: a case study
Proceedings paper2004, Proceedings of the International Symposium on Semiconductor Manufacturing - ISSM, 27/09/2004, p.53-56