Browsing by Author "Yamakawa, T."
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication A high performance electrostatic MEMS vibration energy harvester with corrugated inorganic SiO2-Si3N4 electret
Proceedings paper2013, Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, 16/06/2013, p.693-696Publication Torsional mode MEMS resonator using thin film vacuum package
Oral presentation2012, imec-Handai Symposium