Browsing by Author "Yanovitskaya, Z.S."
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Publication Barrier deposition on porous low-k films
Proceedings paper2003, Proceedings of the Advanced Metallization Conference 2002, 1/10/2002, p.829-833Publication Evaluation of thin Ta(N) film integrity deposited on porous glasses
Journal article2003, Optica Applicata, 33, p.91-96Publication Low dielectric constant materials for microelectronics
Journal article2003-06, Journal of Applied Physics, (93) 11, p.8793-8841Publication Simulations of diffusion barrier deposition on porous low-k films
Journal article2003-11, Microelectronic Engineering, (70) 2_4, p.363-367