Browsing by Author "Yatsuda, K"
Now showing 1 - 2 of 2
- Results per page
- Sort Options
Publication Cryoetching of silicon and advanced materials for 3D interconnects
Meeting abstract2014, ECS Fall Meeting Symposium P5: Processing Materials of 3D Interconnects, Damascene, and Electronics Packaging 6, 5/10/2014, p.1689Publication Cryogenic etching of porous organosilicate low-k materials: fluorine based plasma analysis
Meeting abstract2015, Plasma Etch and Strip in Microtechnology - PESM, 27/04/2015