Browsing by Author "Zanders, Wesley"
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Publication Orthogonal Array Pillar Process Development for High Density 4F2 Memory Cells at 40nm Pitch and Beyond
Proceedings paper2022, Conference on Optical and EUV Nanolithography XXXV Part of SPIE Advanced Conference, APR 24-MAY 27, 2022, p.120510JPublication Pattern deformation mitigation for EUV photoresists using wafer backside cleaning techniques
Publication Screening of 193i and EUV lithography process options for STT-MRAM orthogonal array MTJ pillars
Journal article2021, MICRO AND NANO ENGINEERING, 10, p.100082