Publication:

Orthogonal Array Pillar Process Development for High Density 4F2 Memory Cells at 40nm Pitch and Beyond

Date

2022
Proceedings Paper
https://doi.org/10.1117/12.2618761
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Author(s)

Pak, Murat  
;
Zanders, Wesley  
;
Wong, Patrick  
;
Halder, Sandip  
;
Blanc, Romuald  
;
Souriau, Laurent  
;
Lee, Jeonghoon  
;
Kar, Gouri Sankar  

Journal

Proceedings of SPIE

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1513 since deposited on 2022-09-19
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1513 since deposited on 2022-09-19
1last week
Acq. date: 2025-10-29

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