Browsing by Author "Zhang, Fenghong"
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Publication An optical fibre sensor for particle concentration measurement in water systems based on inter-fibre light coupling between polymer optical fibres
Publication CD control using SiON BARL processing for sub 0.25µm lithography
Oral presentation1998, MNE 98 - Micro- and Nano-Engineering Conference; 22-24 Sept. 1998; Leuven, Belgium.Publication CD control using SiON BARL processing for sub-0.25μm lithography
Journal article1999, Microelectronic Engineering, (46) 1_4, p.51-54Publication How to use DUV BARCs on topography
Journal article1998, Microlithography World, Summer Issue, p.13Publication Optimisation of bottom-ARC processes with respect to CD control
Journal article1998, Future Fab International, 5, p.205-210Publication SiON ARC: Material characterization and implication in lithographic process
Proceedings paper2000, Proceedings Interface - Arch Microlithography Symposium, 5/11/2000, p.191-200