Publication:

How to use DUV BARCs on topography

Date

1998
Journal article
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Author(s)

Op de Beeck, Maaike  
;
Vandenberghe, Geert  
;
Jaenen, Patrick  
;
Zhang, Fenghong
;
Delvaux, Christie  
;
Van Puyenbroeck, Ilse
;
Ronse, Kurt  

Journal

Microlithography World

Abstract

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2011 since deposited on 2021-10-01
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2011 since deposited on 2021-10-01
1last month
Acq. date: 2026-02-27

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