Browsing by Author "Zhang, Mingsheng"

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Digital Etching of Molybdenum Interconnects Using Plasma Oxidation

Erofeev, Ivan
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Hartanto, Antony Winata
;
Khan, Muhaimin Mareum
;
Deng, Kerong
;
Kumar, Krishna
Journal article
2025, ADVANCED MATERIALS INTERFACES, (12) 1, p.Art. 2400558
Evidence of air-induced surface transformation of atomic step-engineered sapphire in relation to epitaxial growth of 2D semiconductors

Fu, Wei
;
Chai, Jianwei
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Kawai, Hiroyo
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Maddumapatabandi, Thathsara
;
Bussolotti, Fabio
Journal article
2025, NATURE COMMUNICATIONS, (16) 1, p.8488
Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions

Deng, Kerong
;
Erofeev, Ivan
;
Chowdhuri, Angshuman Ray
;
Philipsen, Harold
;
Aabdin, Zainul
Journal article
2024, SMALL, (20) 51, p.Art. 2406713