Browsing by Author "Zhang, Xunyuan"
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Publication The impact of ALD TaN barrier processes on different BEOL utra low-k dielectrics
Meeting abstract2015, AVS Topical Conference on Atomic Layer Deposition, 28/06/2015Publication The impact of PEALD TaN barrier processes on different ultra low-k dielectrics
Journal article2015, ECS Journal of Solid State Science and Technology, (4) 12, p.N160-N162