Browsing by Author "Zhang, Yichen"
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Publication E-test validation of space error budget and metrology
Journal article2022-06-30, IEEE Transactions on Semiconductor Manufacturing, (35) 3, p.478-484Publication Feature grouping to enable edge placement error-aware process control in multi-feature logic use case
Proceedings paper2024, Conference on Metrology, Inspection, and Process Control XXXVIII, FEB 26-29, 2024, p.Art. 129550OPublication Surface wave sensors based on nanometric layers of strongly absorbing materials
Journal article2012, Optics Express, (20) 9, p.9431-9441Publication Universal scaling of the figure of merit of plasmonic sensors
Journal article2011, ACS Nano, (5) 6, p.5151-5157