imec Institutional Repository Browsing {{ collection }} by Author "Zhu, C."

Publication

Backside Power Delivery With Relaxed Overlay for Backside Patterning Using Extreme Wafer Thinning and Molybdenum-Filled Slit Nano Through Silicon Vias

Zhao, Peng

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Maes, J. W.

Journal article

2024, IEEE TRANSACTIONS ON ELECTRON DEVICES, (71) 12, p.7963-7969

Publication

Buried Power Rail Metal exploration towards the 1 nm Node

Gupta, Anshul

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Radisic, Dunja

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Maes, J.W.

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Varela Pedreira, Olalla

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Soulie, Jean-Philippe

Proceedings paper

2021, IEEE International Electron Devices Meeting (IEDM), DEC 11-16, 2021

Publication

Selective ALD Mo Deposition in 10nm Contacts

van der Veen, Marleen

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Maes, J. W.

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Varela Pedreira, Olalla

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Zhu, C.

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Tierno, Davide

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Datta, S.

Proceedings paper

2023, IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM), MAY 22-25, 2023

Browsing by Author "Zhu, C."