Browsing by Author "Zijlstra, Aaldert"
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Publication Acoustic cleaning in nano-electronics
Proceedings paper2008, Acoustics, 29/06/2008, p.556-560Publication High speed imaging of 1MHz driven microbubbles in contact with a rigid wall
Oral presentation2008, 9th International Symposium on Ultra Clean Processing of Semiconductor SurfacesPublication High speed imaging of 1MHz driven microbubbles in contact with a rigid wall
Journal article2009, Solid State Phenomena, 145-146, p.7-10Publication Impact of acoustical reflections on megasonic cleaning performance
Meeting abstract2009, 216th ECS Meeting, 4/10/2009, p.2089Publication Impact of acoustical reflections on megasonic cleaning performance
Proceedings paper2009, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11, 4/10/2009, p.287-294Publication Influence of gasification on electro-acoustical and cleaning performance of a 1 MHz nozzle system in megasonic cleaning
Meeting abstract2009, 35th International Conference on Micro & Nano Engineering - MNE, 28/09/2009Publication Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning
Journal article2010, Microelectronic Engineering, (87) 5_8, p.1512-1515Publication Nanoparticle removal in a 1 MHz acoustic cavitation field
Proceedings paper2009, 7th International Symposium on Cavitation - CAV, 16/08/2009Publication Roadblocks and critical aspects for sub 45 nm wafer cleaning and possible solutions
; ; ; ; ; Proceedings paper2008, 7th International Semiconductor Technology Conference - ISTC, 15/03/2008, p.436-446Publication Tackling the challenges of physical cleaning
Oral presentation2008, 8th International Surface Cleaning Users Group Meeting Cleaning Technology SymposiumPublication Transport of Brownian particles driven by bubble microstreaming flows
Proceedings paper2011, ASME 9th 9th International Conference on Nanochannels, Microchannels, and Minichannels - ICNMM, 19/06/2011, p.ICNMM2011-58063