Browsing by Author "Zotovich, A."

Now showing 1 - 3 of 3

Comparison between vacuum ultra-violet emission of CF4/Ar and CF3I/Ar plasmas in CCP chamber for low-k etching

Zotovich, A.
;
El Otell, Ziad
;
de Marneffe, Jean-Francois
;
Proshina, O.
;
Lopaev, D.
;
Rakhimova, T.
Meeting abstract
2015, Plasma Etch and Strip in Microtechnology - PESM, 27/04/2015
Effect of VUV photons on low-k OSG damage and etching by F atoms at the lowered temperature

Lopaev, D
;
Rakhimova, T
;
Mankelevich, Y
;
Kurchikov, K.
;
Zyryanov, S.
;
Zotovich, A.
Meeting abstract
2015, Plasma Etch and Strip in Microtechnology - PESM, 27/04/2015
The chemistry screening for ultra low-k dielectrics plasma etching

Zotovich, A.
;
Krishtab, Mikhail
;
Lazzarino, Frederic
;
Baklanov, Mikhaïl
Proceedings paper
2014, International Conference on Micro- and Nano-Electronics, 6/10/2014, p.944002