Browsing by Author "den Toonder, J.M.J."

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Empirical and theoretical characterisation of electrostatically driven MEMS structures with stress gradients

De Coster, J.
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Tilmans, Harrie
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den Toonder, J.M.J.
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van Beek, J.T.M.
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Rijks, T.G.S.M.
Journal article
2005, Sensors & Actuators A, 123-124, p.555-562
MEMS tunable capacitors and switches for RF applications

Rijks, T.G.S.M.
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van Beek, J.T.M.
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Steeneken, P.G.
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Ulenaers, M.J.E.
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van Eerd, P.
Proceedings paper
2004, Proceedings 24th International Conference on Microelectronics - MIEL, 16/04/2004, p.49-56
Reliability of RF-MEMS: stress relaxation in Al-alloy films

Modlinski, Robert
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Chen, Q.
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Witvrouw, Ann
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Ratchev, Petar
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Puers, Bob
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den Toonder, J.M.J.
Meeting abstract
2003, 14th MicroMechanics Europe Workshop, 2/11/2003