Browsing by Author "van Ingen Schenau, K."
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Publication 248 nm lithography for the 0.18 μm generation
Proceedings paper1996, Proceedings of the Microlithography Seminar INTERFACE'96, 27/10/1996, p.29-42Publication Process optimization for sub-100-nm gate patterns using phase edge lithography
Proceedings paper2001, Advances in Resist Technology and Processing XVIII, 26/02/2001, p.200-211Publication Status of ArF lithography for the 130nm technology node
Proceedings paper2000, Optical Microlithography XIII, 1/03/2000, p.410