Browsing by Author "van Look, Lieve"
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Publication Image contrast metrology for EUV lithography
Proceedings paper2022-09-29, International Conference on Extreme UltraViolet Lithography, SEP 26-29, 2022, p.122920APublication Impact of mask corner rounding on pitch 40 nm contact hole variability
Proceedings paper2021, International Conference on Extreme Ultraviolet Lithography, SEP 27-OCT 01, 2021, p.1185406Publication Stitching for High NA: zooming in on CDU budget
Proceedings paper2023, International Conference on Extreme Ultraviolet Lithography, OCT 02-05, 2023, p.Art. 1275002