Browsing by Author "van den Berg, J. A."

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Cluster formation during annealing of ultra-low-energy boron-implanted silicon

Collart, E. J. H.
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Murrell, A. J.
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Foad, M. A.
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van den Berg, J. A.
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Zhang, S.
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Armour, D.
;
Goldberg, R. D.
Journal article
2000, J. Vacuum Science and Technology B, (B18) 1, p.435-439
High resolution medium energy ion scattering (MEIS) analysis for the quantitative depth profiling of ultra thin high-k layers

Reading, M. A.
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van den Berg, J. A.
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Zalm, P. C.
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Armour, D. G.
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Bailey, P.
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Noakes, T. C. Q.
;
Parisini, A.
Journal article
2010, Journal of Vacuum Science and Technology B, (28) 1, p.C1C65-C1C70