Browsing by author "Blasco, Nicolas"
Now showing items 1-6 of 6
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ALD of ZrO2, TiO2 and ZrTiO4 thin films from heteroleptic precursors
Schaekers, Marc; Opsomer, Karl; Rampelberg, Geert; Deduytse, Davy; Detavernier, Christophe; Blasco, Nicolas; Zauner, Andy (2010) -
ALD of ZrO2, TiO2 and ZrTiO4 thin films from novel heteroleptic precursors
Schaekers, Marc; Opsomer, Karl; Deduytsche, Davy; Detavernier, Christophe; Blasco, Nicolas; Zauner, Andy (2008) -
Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
Rampelberg, Geert; Devloo-Casier, Kilian; Deduytsche, Davy; Schaekers, Marc; Blasco, Nicolas; Detavernier, Christophe (2013) -
Semiconductor-metal transition in thin VO2 films deposited by ozone based atomic layer deposition
Rampelberg, Geert; Schaekers, Marc; Martens, Koen; Xie, Qi; Deduytsche, Davy; De Schutter, Bob; Blasco, Nicolas; Kittl, Jorge; Detavernier, Christophe (2012) -
Semiconductor-metal transition in thin VO2 films grown by ozone based atomic layer deposition
Rampelberg, Geert; Schaekers, Marc; Martens, Koen; Xie, Qi; Deduytsche, Davy; De Schutter, Bob; Blasco, Nicolas; Kittl, Jorge; Detavernier, Christophe (2011) -
The deposition Of Ru and RuO2 flms for DRAM electrode
Schaekers, Marc; Capon, Boris; Detavernier, Christophe; Blasco, Nicolas (2010)