Browsing by author "Palov, A."
Now showing items 1-5 of 5
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Calculation of dielectric constant of porous SiCOH low-k films
Palov, A.; Rakhimova, T; Krishtab, Mikhail; Baklanov, Mikhaïl (2015) -
Interaction of atomic fluorine with porous low-k SiCOH films: modeling
Palov, A.; Voronina, E.; Lopaev, D.; Mankelevich, Y.; Rakhimova, T.; Zyryanov, S.; Proshina, O.; Baklanov, Mikhaïl (2015) -
Low-k OSG damage and etching by F atoms at lowered temperatures
Zyryanov, S.; Kurchikov, D.; Lopaev, D.; Mankelevich, Y.; Palov, A.; Rakhimova, T.; Voronina, E.; Novikova, N.; Baklanov, Mikhaïl (2015) -
Modelling degradation of PTFE under electron irradiation
Palov, A.; Fujii, H.; Mankelevich, Y.; Rakhimova, T.; Baklanov, Mikhaïl (2012) -
Multi-step reaction mechanism for F atom interactions with organosilicate glass and SiOx films
Mankelevich, Y.; Voronina, E.; Rakhimova, T.; Palov, A.; Lopaev, D.V.; Zyryanov, S.M.; Baklanov, Mikhaïl (2016)