Authors

Mankelevich, Y.; Voronina, E.; Rakhimova, T.; Palov, A.; Lopaev, D.V.; Zyryanov, S.M.; Baklanov, Mikhaïl

ISSN

0022-3727

Issue

34

Journal

Journal of Physics D: Applied Physics

Volume

49

Title

Multi-step reaction mechanism for F atom interactions with organosilicate glass and SiOx films

Publication type

Journal article