Publication:
Multi-step reaction mechanism for F atom interactions with organosilicate glass and SiOx films
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1938 since deposited on 2021-10-23
3last month
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Acq. date: 2025-12-15
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Views
1938 since deposited on 2021-10-23
3last month
2last week
Acq. date: 2025-12-15
Citations