Browsing by author "Schmidt, M.O."
Now showing items 1-6 of 6
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A feasibility study of dual damascene porous SiLK resin with spin-on hard masks
Hoofman, Romano; Michelon, Julien; Verheijden, G.J.A.M.; Waeterloos, Joost; Caluwaerts, Rudy; Schmidt, M.O.; Demeurisse, Caroline; Vandeweyer, Tom; Demuynck, Steven; Tokei, Zsolt; Beyer, Gerald (2004) -
Influence of frequency on the removal efficiency of nano-particles in a megasonic spray cleaning tool
Schmidt, M.O.; Vereecke, Guy; Vos, Rita; Holsteyns, Frank; Baeyens, Martien; Mertens, Paul (2003) -
Influence of hardware and chemistry on the removal of nano-particles in a megasonic cleaning tank
Vereecke, Guy; Vos, Rita; Holsteyns, Frank; Schmidt, M.O.; Baeyens, Martien; Gomme, Steven; Snow, Jim; Coenen, V.; Mertens, Paul; Bauer, T.; Heyns, Marc (2003) -
Investigating the role of gas cavitation in megasonic nanoparticle removal
Vereecke, Guy; Parton, Els; Holsteyns, Frank; Xu, K; Vos, Rita; Mertens, Paul; Schmidt, M.O.; Bauer, T. (2004) -
Resist strip and Cu diffusion barrier etch in Cu BEOL integration schemes in a Mattson HighlandsTM chamber
Mannaert, Geert; Van Cauwenberghe, Marc; Schmidt, M.O.; Van Aelst, Joke; Hendrickx, Dirk; Stucchi, Michele; Conard, Thierry; Vanhaelemeersch, Serge; Boullart, Werner (2003) -
Using a biased-ICP reactor for PR strip and Cu barrier removal
Van Cauwenberghe, Marc; Mannaert, Geert; Boullart, Werner; Hendrickx, Dirk; Schmidt, M.O. (2004)