Authors

Schmidt, M.O.; Vereecke, Guy; Vos, Rita; Holsteyns, Frank; Baeyens, Martien; Mertens, Paul

Conference

Ultra Clean Processing of Silicon Surfaces 2002 - UCPSS

Title

Influence of frequency on the removal efficiency of nano-particles in a megasonic spray cleaning tool

Publication type

Proceedings paper

Embargo date

9999-12-31