Influence of frequency on the removal efficiency of nano-particles in a megasonic spray cleaning tool

dc.contributor.author	Schmidt, M.O.
dc.contributor.author	Vereecke, Guy
dc.contributor.author	Vos, Rita
dc.contributor.author	Holsteyns, Frank
dc.contributor.author	Baeyens, Martien
dc.contributor.author	Mertens, Paul
dc.contributor.imecauthor	Vereecke, Guy
dc.contributor.imecauthor	Vos, Rita
dc.contributor.imecauthor	Holsteyns, Frank
dc.contributor.imecauthor	Mertens, Paul
dc.contributor.orcidimec	Vereecke, Guy::0000-0001-9058-9338
dc.date.accessioned	2021-10-15T06:32:06Z
dc.date.available	2021-10-15T06:32:06Z
dc.date.embargo	9999-12-31
dc.date.issued	2003
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/8110
dc.source.beginpage	147
dc.source.conference	Ultra Clean Processing of Silicon Surfaces 2002 - UCPSS
dc.source.conferencedate	16/09/2002
dc.source.conferencelocation	Oostende Belgium
dc.source.endpage	151
dc.title	Influence of frequency on the removal efficiency of nano-particles in a megasonic spray cleaning tool
dc.type	Proceedings paper
dspace.entity.type	Publication
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