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Influence of frequency on the removal efficiency of nano-particles in a megasonic spray cleaning tool
Publication:
Influence of frequency on the removal efficiency of nano-particles in a megasonic spray cleaning tool
Date
2003
Proceedings Paper
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7830.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Schmidt, M.O.
;
Vereecke, Guy
;
Vos, Rita
;
Holsteyns, Frank
;
Baeyens, Martien
;
Mertens, Paul
Journal
Abstract
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1961
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1961
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations