Browsing by author "Green, M."
Now showing items 1-5 of 5
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Benchmarking yield assessment exercise in different climates within an international collaboration framework
Moser, D.; Herz, M.; Müller, B.; Horvath, Imre T; Schils, Arnaud; Ramesh, Santhosh; Green, M.; Vedde, J.; Barnard, D.; Herteleer, B.; Tsanakas, J.A. (2020) -
Impact of band structure on charge trapping in thin SiO2/Al2O3/poly-Si gate stacks
Pantisano, Luigi; Lucci, L.; Cartier, Ed; Kerber, Andreas; Groeseneken, Guido; Green, M.; Selmi, L. (2004-05) -
Issues, achievements and challenges towards intergration of high-k dielectrics
Heyns, Marc; Bender, Hugo; Caymax, Matty; Carter, R; Claes, Martine; Conard, Thierry; Boullart, Werner; De Gendt, Stefan; Degraeve, Robin; Deweerd, Wim; Groeseneken, Guido; Houssa, Michel; Kubicek, Stefan; Lujan, Guilherme; Nohira, H.; Pantisano, Luigi; Petry, Jasmine; Röhr, Erika; Vandervorst, Wilfried; Van Elshocht, Sven; Xu, Zhen; Zhao, Chao; Cartier, E.; Chen, J.; Cosnier, V.; Green, M.; Jang, S.E.; Kaushik, Vidya; Kerber, A.; Kluth, J.; Lin, S.; Tsai, Wilman; Young, Edward; Manabe, Y. (2002) -
On the application of a thin ozone based wet chemical oxide as an interface for ALD high-k deposition
Onsia, Bart; Caymax, Matty; Conard, Thierry; De Gendt, Stefan; De Smedt, Frank; Delabie, Annelies; Gottschalk, C.; Green, M.; Heyns, Marc; Lin, S.; Mertens, Paul; Tsai, Wilman; Vinckier, Chris (2004) -
On the application of a thin ozone based wet chemical oxide as an interface for ALD high-k deposition
Onsia, Bart; Caymax, Matty; Conard, Thierry; De Gendt, Stefan; De Smedt, Frank; Delabie, Annelies; Gottschalk, C.; Green, M.; Heyns, Marc; Lin, S.; Mertens, Paul; Tsai, Wilman; Vinckier, Chris (2005)