Impact of band structure on charge trapping in thin SiO2/Al2O3/poly-Si gate stacks

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Authors

Pantisano, Luigi; Lucci, L.; Cartier, Ed; Kerber, Andreas; Groeseneken, Guido; Green, M.; Selmi, L.

Issue

5

Journal

IEEE Electron Device Letters

Volume

25

Title

Impact of band structure on charge trapping in thin SiO2/Al2O3/poly-Si gate stacks

Publication type

Journal article

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