Browsing by author "Radovanovic, Sanda"
Now showing items 1-3 of 3
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Evaluation of post ion-implantation resist strip with the background signal of a light scattering tool
Halder, Sandip; Vos, Rita; Wada, Masayuki; Tsvetanova, Diana; Claes, Martine; Mertens, Paul; Radovanovic, Sanda; Dighe, Prasanna; Amann, Christophe; Simpson, Gavin; Polli, Marco (2010) -
Use of surface haze for evaluation of photoresist residue removal efficiency
Halder, Sandip; Vos, Rita; Wada, Masayuki; Kenis, Karine; Bearda, Twan; Radovanovic, Sanda; Dighe, Prasanna; Leunissen, Peter; Mertens, Paul (2009) -
Using the background signal of a light scattering tool for I/I photo resist strip optimization and monitoring
Halder, Sandip; Vos, Rita; Wada, Masayuki; Claes, Martine; Kenis, Karine; Mertens, Paul; Dighe, Prasanna; Radovanovic, Sanda; Simpson, Gavin; Sonnemans, Roger (2010)