Browsing by author "Dorney, Kevin"
Now showing items 1-9 of 9
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A scientific framework for establishing ultrafast molecular dynamic research in imec's AttoLab
Galleni, Laura; Sajjadian, Faegheh; Conard, Thierry; Pollentier, Ivan; Dorney, Kevin; Holzmeier, Fabian; Witting Larsen, Esben; Escudero, Daniel; Pourtois, Geoffrey; van Setten, Michiel; van der Heide, Paul; Petersen, John (2023) -
Actinic inspection of the EUV optical parameters of lithographic materials with lab-based radiometry and reflectometry
Dorney, Kevin; Kissoon, Nicola; Holzmeier, Fabian; Witting Larsen, Esben; Singh, Dhirendra; Arvind, Shikhar; Santra, Sayantani; Fallica, Roberto; Makhotkin, Igor; Philipsen, Vicky; De Gendt, Stefan; Fleischmann, Claudia; van der Heide, Paul; Petersen, John (2023-04-28) -
Actinic photoemission spectroscopy of litho materials using a table-top ultrafast EUV source
Singh, Dhirendra; Dorney, Kevin; Holzmeier, Fabian; Witting Larsen, Esben; Galleni, Laura; Mokhtarzadeh, Charles; van Setten, Michiel; Conard, Thierry; Petersen, John; van der Heide, Paul (2024) -
Bright, single helicity, high harmonics driven by mid-infrared bicircular laser fields
Fan, Tingting; Nguyen, Quynh L. D.; Ellis, Jennifer; Hickstein, Daniel D.; Brooks, Nathan; Zusin, Dmitriy; Gentry, Christian; Hernandez-Garcia, Carlos; Kapteyn, Henry C.; Murnane, Margaret; Dorney, Kevin (2021) -
Disruptive EUV Material Characterization in imec's AttoLab
Dorney, Kevin (2023-06-04) -
Introduction to imec's AttoLab for ultrafast kinetics of EUV exposure processes and ultra-small pitch lithography
Holzmeier, Fabian; Dorney, Kevin; Witting Larsen, Esben; Nuytten, Thomas; Singh, Dhirendra; van Setten, Michiel; Vanelderen, Pieter; Bargsten, Clayton; Cousin, Seth; Raymondson, Daisy; Rinard, Eric; Ward, Rod; Kapteyn, Henry; Bottcher, Stefan; Dyachenko, Oleksiy; Kremzow, Raimund; Wietstruk, Marko; Pourtois, Geoffrey; van der Heide, Paul; Petersen, John (2021-02-22) -
Lloyd's Mirror Interference Lithography Below a 22-nm Pitch with an Accessible, Table-top, 13.5 nm High-Harmonic EUV Source
Dorney, Kevin; Castellanos, Sonia; Witting Larsen, Esben; Holzmeier, Fabian; Singh, Dhirendra Pratap; Vandenbroeck, Nadia; De Simone, Danilo; De Schepper, Peter; Vaglio Pret, Alessandro; Bargsten, Clayton; Cousin, Seth; Raymondson, Daisy; Rinard, Eric; Ward, Rod; Kapteyn, Henry; Nuytten, Thomas; van der Heide, Paul; Petersen, John (2021) -
Photoemission spectroscopy on photoresist materials: A protocol for analysis of radiation sensitive materials
Sajjadian, Faegheh; Galleni, Laura; Dorney, Kevin; Singh, Dhirendra; Holzmeier, Fabian; van Setten, Michiel; De Gendt, Stefan; Conard, Thierry (2023)