Browsing by author "Pierloot, Christine"
Now showing items 1-5 of 5
-
Atomic layer deposition of ruthenium on ruthenium surfaces: a theoretical study
Phung, Quan; Pourtois, Geoffrey; Swerts, Johan; Pierloot, Christine; Delabie, Annelies (2015) -
Atomic layer deposition of ruthenium on titanium nitride surface: a density functional theory study
Phung, Quan; Vancoillie, Steven; Pourtois, Geoffrey; Swerts, Johan; Pierloot, Christine; Delabie, Annelies (2013) -
Atomic layer deposition of tantalum oxide and tantalum silicate from chloride precursors
Adelmann, Christoph; Delabie, Annelies; Schepers, Bart; Rodriguez, Leonard; Franquet, Alexis; Conard, Thierry; Opsomer, Karl; Vaesen, Inge; Moussa, Alain; Pourtois, Geoffrey; Pierloot, Christine; Caymax, Matty; Van Elshocht, Sven (2012) -
Reactions mechanisms in Al2O3 atomic layer deposition studied by density functional theory
Delabie, Annelies; Pourtois, Geoffrey; Sioncke, Sonja; Van Elshocht, Sven; Pierloot, Christine (2012) -
Ruthenocene and cyclopentadienyl pyrrolyl ruthenium as precursors for ruthenium atomic layer deposition: a comparative study of dissociation enthalpies
Phung, Quan; Vancoillie, Steven; Delabie, Annelies; Pourtois, Geoffrey; Pierloot, Christine (2012)