Browsing by author "Mouche, Laurent"
Now showing items 1-10 of 10
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Development of a reduced cleaning process for application in a spray processor
Snee, Peter; Mouche, Laurent; Mertens, Paul; Meuris, Marc; Schmidt, Harald; Heyns, Marc (1996) -
Impact of the electrochemical properties of silicon wafer surfaces on copper outplating from HF solutions
Teerlinck, Ivo; Schmidt, Harald; Rotondaro, Antonio; Hurd, Trace; Mouche, Laurent; Mertens, Paul; Meuris, Marc; Heyns, Marc; Vanhaeren, Danielle; Vandervorst, Wilfried (1996) -
Light point defect generation during photoresist spin coating
Mouche, Laurent; Meuris, Marc; Heyns, Marc (1997) -
Photoresist filtration performance of UPE and PTFE filters
Mouche, Laurent; Meuris, Marc; Heyns, Marc; Zahka, J. (1996) -
Point of use HF purification for Si surface preparation
Fyen, Wim; Mouche, Laurent; Meuris, Marc; Heyns, Marc; Zahka, J. (1996) -
Point of use HF purification for silicon surface preparation by ion exchange
Fyen, Wim; Mouche, Laurent; Meuris, Marc; Heyns, Marc; Zahka, J. (1997) -
Post metal etch polymer removal: an investigation of the cleaning to remove residual of Si-C and Si-F after fluorocarbon plama etch on the silicon surface
Boullart, Werner; Mannaert, Geert; Graham, S.; Tarassenko, C.; Mouche, Laurent (1998) -
Post metal etch polymer removal: an investigation of the cleaning to remove residual of Si-C and Si-F after fluorocarbon plama etch on the silicon surface
Boullart, Werner; Mannaert, Geert; Graham, S.; Tarassenko, C.; Mouche, Laurent (1999) -
Silicon surface roughening in an iron contaminated SCl bath
Knotter, D. M.; Mouche, Laurent; Meuris, Marc; Heyns, Marc (1996) -
Ultra thin gate oxide technology and reliability
Heyns, Marc; Depas, Michel; Teerlinck, Ivo; Meuris, Marc; Mertens, Paul; Vanhellemont, Jan; Mouche, Laurent; Nigam, Tanya; Wilhelm, Rudi; Knotter, Martin; Wolke, K.; Crossley, A.; Sofield, C. J.; Gräf, D. (1996)