Browsing by author "Bruggeman, B."
Now showing items 1-3 of 3
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Optimisation methodology towards a manufacturable 0.3 μm poly-gate process using i-line lithography
Finders, Jo; Bruggeman, B.; Ronse, Kurt; Van den hove, Luc; Tzviatkov, Plamen; Dusa, M. (1996) -
SEM proximity effect for poly gate patterns
Finders, Jo; Potoms, Goedele; Ronse, Kurt; Van den hove, Luc; Van Driessche, Veerle; Tzviatkov, Plamen; Bruggeman, B.; Caligiore, A. (1997) -
Strategies to improve linewidth control for 0.25 µm and 0.18 µm devices
Op de Beeck, Maaike; Ronse, Kurt; Goethals, Mieke; Vandenberghe, Geert; Bruggeman, B.; Van den hove, Luc (1996)