Browsing by author "Dusa, M."
Now showing items 1-5 of 5
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CD control using SiON BARL processing for sub 0.25µm lithography
Zhang, Fenghong; Op de Beeck, Maaike; Ronse, Kurt; Gangala, Hareen K; Gopalan, P.; Conley, P.; Dusa, M.; Bendik, Joe (1998) -
CD control using SiON BARL processing for sub-0.25μm lithography
Zhang, Fenghong; Op de Beeck, Maaike; Schaekers, Marc; Ronse, Kurt; Conley, W.; Gopalan, P.; Gangala, Hareen K; Dusa, M.; Bendik, Joe (1999) -
CD-control comparison for sub-0.18μm patterning using 248 nm lithography and strong resolution enhancement techniques
Vandenberghe, Geert; Marschner, Thomas; Ronse, Kurt; Socha, R.; Dusa, M. (1999) -
KrF lithography for 130nm
Finders, Jo; van Schoot, J.; Vanoppen, Peter; Dusa, M.; Socha, B.; Vandenberghe, Geert; Ronse, Kurt (2000) -
Optimisation methodology towards a manufacturable 0.3 μm poly-gate process using i-line lithography
Finders, Jo; Bruggeman, B.; Ronse, Kurt; Van den hove, Luc; Tzviatkov, Plamen; Dusa, M. (1996)