Browsing by author "Lavoie, Christian"
Now showing items 1-3 of 3
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Kinetics of Ni3Si2 formation in the Ni2Si-NiSi thin film reaction from in situ measurements
Kittl, Jorge; Pawlak, Malgorzata; Torregiani, Cristina; Lauwers, Anne; Demeurisse, Caroline; Vrancken, Christa; Absil, Philippe; Biesemans, Serge; Detavernier, Christophe; Jordan-Sweet, Jean; Lavoie, Christian (2007) -
Stress evolution during Ni-Si compound formation for fully silicided (FUSI) gates
Torregiani, Cristina; Van Bockstael, Charlotte; Detavernier, Christophe; Lavoie, Christian; Lauwers, Anne; Kittl, Jorge (2007) -
Transient and end silicide phase formation in thin film Ni/polycrystalline-Si reactions for fully-silicided gate applications
Kittl, Jorge; Pawlak, Malgorzata; Torregiani, Cristina; Lauwers, Anne; Demeurisse, Caroline; Vrancken, Christa; Absil, Philippe; Biesemans, Serge; Coia, Cedrik; Detavernier, Christophe; Jordan-Sweet, Jean; Lavoie, Christian (2007)