Publication:
Stress evolution during Ni-Si compound formation for fully silicided (FUSI) gates
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1920 since deposited on 2021-10-16
7last month
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Acq. date: 2026-04-06
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Statistics
Views
1920 since deposited on 2021-10-16
7last month
3last week
Acq. date: 2026-04-06
Citations