Browsing by author "Onishi, K."
Now showing items 1-5 of 5
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A high performance electrostatic MEMS vibration energy harvester with corrugated inorganic SiO2-Si3N4 electret
Renaud, Michael; Altena, Geert; Goedbloed, Martijn; de Nooijer, Christine; Matova, Svetla; Naito, Y.; Yamakawa, T.; Takeuchi, H.; Onishi, K.; van Schaijk, Rob (2013) -
A MEMS 0-level packaging technology based on CuSn/Cu chip capping bonding
Bogaerts, Lieve; Phommahaxay, Alain; Rottenberg, Xavier; Naito, Yasyuki; De Coster, Jeroen; Varela Pedreira, Olalla; Van Hoovels, Nele; Cherman, Vladimir; Helin, Philippe; Onishi, K.; Tilmans, Harrie (2011) -
A wafer-level poly-SiGe-based thin film packaging technology demonstrated on a SOI-based high-Q MEM resonator
Helin, Philippe; Verbist, Agnes; De Coster, Jeroen; Guo, Bin; Severi, Simone; Witvrouw, Ann; Haspeslagh, Luc; Tilmans, Harrie; Naito, Yasuyuki; Onishi, K. (2011) -
High-Q torsional mode Si triangular beam resonators encapsulated using SiGe thin film
Naito, Yasuyuki; Helin, Philippe; Nakamura, K.; De Coster, Jeroen; Guo, Bin; Haspeslagh, Luc; Onishi, K.; Tilmans, Harrie (2010) -
Torsional mode MEMS resonator using thin film vacuum package
Onishi, K.; Naito, Yasuyuki; Yamakawa, T.; Nakamura, K.; Helin, Philippe; De Coster, Jeroen; Haspeslagh, Luc; Tilmans, Harrie (2012)