Browsing by author "Rink, I."
Now showing items 1-4 of 4
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Alternative post-etch polymer removal in a single-wafer platform
Dundas, C.; Vroom, R.; Ghekiere, John; Van Doorne, Patrick; Rink, I.; Sharp, I.; Heffernan, S. (2003) -
Calibration of straight total reflection X-ray fluorescence spectrometry - results of a European round robin test
Rink, I.; Rostam-Khani, P.; Knoth, J.; Schwenke, H.; De Gendt, Stefan; Wortelboer, R. (2001) -
Vapor phase decomposition - droplet collection evalutation of a wafer surface preparation system
De Gendt, Stefan; Arnauts, Sophia; Witters, Thomas; Boehme, W.; Gonchond, J. P.; Huber, A.; Lerche, J.; Loewenstein, Lee; Rink, I.; Wortelboer, R.; Meuris, Marc; Heyns, Marc (2000) -
Vapor phase decomposition - droplet collection: Evalutation of a wafer surface preparation system
De Gendt, Stefan; Arnauts, Sophia; Witters, Thomas; Rink, I.; Wortelboer, R.; Huber, A.; Meuris, Marc; Heyns, Marc (1999)