Browsing by author "Hueging, Norbert"
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Strain relaxation of SiGe/Si heterostructures by helium ionimplantation and subsequent annealing : Helium precipitates acting as dislocation sources
Hueging, Norbert; Luysberg, Martina; Urban, Knut; Buca, Dan; Hollaender, Bernd; Mantl, Siegfried; Morschbacher, Marcio; Fichtner, Paulo; Loo, Roger; Caymax, Matty (2005) -
The role of internal dislocation sources for the strain ralaxation of pseudomorphic SiGe/Si structures
Luysberg, Martina; Hueging, Norbert; Lenk, Steffi; Buca, Dan; Hollaender, Bernd; Mantl, Siegfried; Marcio, J; Fichtner, Paulo; Loo, Roger; Caymax, Matty (2004) -
The use of ion implantation of strained silicon on SiO2 for nanoelectronic devices
Mantl, S.; Buca, Dan; Hollander, Bernd; Trinkaus, Helmut; Hueging, Norbert; Luysberg, Martina; Lenk, Steffi; Loo, Roger; Caymax, Matty; Shaefer, Herbert; Reiche, Manfred; Radu, Ionut (2005)