Authors

Mantl, S.; Buca, Dan; Hollander, Bernd; Trinkaus, Helmut; Hueging, Norbert; Luysberg, Martina; Lenk, Steffi; Loo, Roger; Caymax, Matty; Shaefer, Herbert; Reiche, Manfred; Radu, Ionut

Conference

MRS Fall Meeting Symposium OO: Growth, Modification, and Analysis by Ion Beams at the Nanoscale

Title

The use of ion implantation of strained silicon on SiO2 for nanoelectronic devices

Publication type

Proceedings paper