Browsing by author "Zotovich, A."
Now showing items 1-3 of 3
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Comparison between vacuum ultra-violet emission of CF4/Ar and CF3I/Ar plasmas in CCP chamber for low-k etching
Zotovich, A.; El Otell, Ziad; de Marneffe, Jean-Francois; Proshina, O.; Lopaev, D.; Rakhimova, T.; Baklanov, Mikhaïl (2015) -
Effect of VUV photons on low-k OSG damage and etching by F atoms at the lowered temperature
Lopaev, D; Rakhimova, T; Mankelevich, Y; Kurchikov, K.; Zyryanov, S.; Zotovich, A.; Baklanov, Mikhaïl (2015) -
The chemistry screening for ultra low-k dielectrics plasma etching
Zotovich, A.; Krishtab, Mikhail; Lazzarino, Frederic; Baklanov, Mikhaïl (2014)