Browsing by author "Fujikawa, Makoto"
Now showing items 1-3 of 3
-
Gas phase pore stuffing for the protection of organo-silicate glass dielectric materials
Fujikawa, Makoto; de Marneffe, Jean-Francois; Chanson, Romain; Babaei Gavan, Khashayar; Rezvanov, Askar; Lazzarino, Frederic; Tokei, Zsolt; Yamaguchi, T.; Nozawa, N.; Sato, Nagisa (2018) -
Novel volatile film for the protection of organo-silicate glass dielectric materials
Fujikawa, Makoto; Yamaguchi, Tatsuya; Nozawa, S.; Kikuchi, Y.; Maekawa, Kaoru; Kawasaki, H.; Chanson, Romain; de Marneffe, Jean-Francois (2019) -
Use of a thermally degradable chemical vapor deposited polymer film for low damage plasma processing of highly porous dielectrics
de Marneffe, Jean-Francois; Yamaguchi, Tatsuya; Fujikawa, Makoto; Rezvanov, Askar; Chanson, Romain; Zhang, Jianran; Babaei Gavan, Khashayar; El Otell, Ziad; Nozawa, S.; Kikuchi, Y.; Maekawa, Kaoru (2019)